This inspection system uses a very minute micro-focus X-ray device with a focal point of approximately 5 µm. It is a precision inspection system that can enlarge and photograph minute defects and abnormal objects at a maximum 100 times magnification. In combination with a television monitor, fluoroscopic images may be observed in real-time. Also, a 5-axis manipulator is provided and three-dimensional fluoroscopic observation is possible while moving the inspected objects from all angles. Also, the portable type micro-focus X-ray device may be used to conduct precision inspections in the field.
For example, the system can be applied to following situations.

(1) Examination of internal condition of various small type precision parts
(2) Examination of wire breakage of electronic and electric parts
(3) Inspection of turbine blades
(4) Inspection of internal flaws of aluminum parts
(5) Examination of foreign matter inside products

The system is applicable to all kinds of inspection targets in all fields that can be fluoroscoped.